Nanofabrication by Ion-Beam Sputtering
Fundamentals and Applications| By: | Tapobrata Som |
| Publisher: | CRC Press |
| Print ISBN: | 9789814303750 |
| eText ISBN: | 9789814303767 |
| Edition: | 1 |
| Copyright: | 2013 |
| Format: | Page Fidelity |
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Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attracti