ULSI Front-End Technology: Covering from the First Semiconductor Paper to CMOS FINFET Technology
| By: | Wai Shing Lau |
| Publisher: | World Scientific Publishing |
| Print ISBN: | 9789813222151 |
| eText ISBN: | 9789813222175 |
| Edition: | 0 |
| Copyright: | 2018 |
| Format: | Reflowable |
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Table of Contents
The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.