Micro and Nano Fabrication
Tools and Processes| By: | Hans H. Gatzen; Volker Saile; Jürg Leuthold |
| Publisher: | Springer Nature |
| Print ISBN: | 9783662443941 |
| eText ISBN: | 9783662443958 |
| Edition: | 0 |
| Copyright: | 2015 |
| Format: | Reflowable |
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.