Silicon Anodization as a Structuring Technique
Literature Review, Modeling and Experiments| By: | Alexey Ivanov |
| Publisher: | Springer Nature |
| Print ISBN: | 9783658192372 |
| eText ISBN: | 9783658192389 |
| Edition: | 0 |
| Copyright: | 2018 |
| Format: | Page Fidelity |
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Table of Contents
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.