Temperature Measurement during Millisecond Annealing
Ripple Pyrometry for Flash Lamp Annealers| By: | Denise Reichel |
| Publisher: | Springer Nature |
| Print ISBN: | 9783658113872 |
| eText ISBN: | 9783658113889 |
| Edition: | 0 |
| Copyright: | 2015 |
| Format: | Page Fidelity |
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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.