Nanopositioning Technologies
Fundamentals and Applications| By: | Changhai Ru |
| Publisher: | Springer Nature |
| Print ISBN: | 9783319238524 |
| eText ISBN: | 9783319238531 |
| Edition: | 0 |
| Copyright: | 2016 |
| Format: | Page Fidelity |
eBook Features
Instant Access
Purchase and read your book immediately
Read Offline
Access your eTextbook anytime and anywhere
Study Tools
Built-in study tools like highlights and more
Read Aloud
Listen and follow along as Bookshelf reads to you
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.