Particle Control for Semiconductor Manufacturing
| By: | R.P. Donovan |
| Publisher: | Taylor & Francis |
| Print ISBN: | 9780824782429 |
| eText ISBN: | 9781351425742 |
| Edition: | 1 |
| Copyright: | 1990 |
| Format: | Reflowable |
Lifetime - $540.00
eBook Features
Instant Access
Purchase and read your book immediately
Read Offline
Access your eTextbook anytime and anywhere
Study Tools
Built-in study tools like highlights and more
Read Aloud
Listen and follow along as Bookshelf reads to you
Details
Table of Contents
There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In