Plasma Deposited Thin Films
| By: | J. Mort; F. Jansen |
| Publisher: | Taylor & Francis |
| Print ISBN: | 9781315896717 |
| eText ISBN: | 9781351092715 |
| Edition: | 1 |
| Copyright: | 1986 |
| Format: | Reflowable |
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Table of Contents
In Summary, the objective of this book is to present in one volume a review of the plasma deposition process and the present understanding of the most important and widely used plasma deposited thin film materials, devices and their applications.