A Guide to Hands-on MEMS Design and Prototyping
| By: | Joel A. Kubby |
| Publisher: | Cambridge University Press |
| Print ISBN: | 9780521889254 |
| eText ISBN: | 9781139124119 |
| Edition: | 1 |
| Format: | Reflowable |
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Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.