Handbook of Sputter Deposition Technology: Principles, Technology and Applications
| By: | Wasa, Kiyotaka; Hayakawa, Shigeru |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780815512806 |
| eText ISBN: | 9780815517740 |
| Edition: | 0 |
| Format: | Page Fidelity |
Lifetime - $180.00
eBook Features
Instant Access
Purchase and read your book immediately
Read Offline
Access your eTextbook anytime and anywhere
Study Tools
Built-in study tools like highlights and more
Read Aloud
Listen and follow along as Bookshelf reads to you
Details
Table of Contents
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.
Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.