Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions
| By: | Rossnagel, Stephen M.; Westwood, William D.; Cuomo, Jerome J. |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780815512202 |
| eText ISBN: | 9780815517641 |
| Edition: | 0 |
| Format: | Page Fidelity |
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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.