Fundamental Principles of Optical Lithography: The Science of Microfabrication
The Science of Microfabrication| By: | Chris Mack |
| Publisher: | Wiley Professional Development (P&T) |
| Print ISBN: | 9780470727300 |
| eText ISBN: | 9780470723869 |
| Edition: | 1 |
| Copyright: | 2007 |
| Format: | Page Fidelity |
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Table of Contents
Engineers working in the semiconductor industry, universities offering classes in semiconductor lithography.
Primary Market
Semiconductor lithography professionals.
Secondary Market
Students taking classes in semiconductor lithography.