Deep Implants: Fundamentals and Applications
| By: | Bentini, G.G.; Golanski, A.; Kalbitzer, S. |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780444873323 |
| eText ISBN: | 9780444596376 |
| Edition: | 0 |
| Format: | Page Fidelity |
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Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very surface and the bulk and show great promise for application in the electronics industry.