Ion Implantation Technology - 94
| By: | Coffa, S.; Ferla, G.; Rimini, E.; Priolo, F. |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780444821942 |
| eText ISBN: | 9780444599728 |
| Edition: | 0 |
| Format: | Page Fidelity |
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The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.
The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.